Top 4 Lithography Machine Manufacturers in 2023

Lithography machines play a crucial role in the semiconductor industry, as they enable the mass production of intricate microchips that power countless electronic devices.

As an individual keen on this subject, I understand that identifying the top manufacturers in this realm is essential for those looking to invest in or learn about the cutting-edge technology driving our world forward.

Consequently, I thought it would be useful to shed light on these leading lithography machine manufacturers and their contributions to the industry.

The global market for semiconductor lithography equipment continues to evolve, driven by the increasing demand for miniaturized and enhanced-performance electronic components.

In this context, I’ve observed that certain companies have emerged as frontrunners in the race to meet this need.

These manufacturers possess the expertise and innovation necessary to create advanced lithography machines capable of producing increasingly sophisticated chips, while also maintaining efficiency and cost-effectiveness.

Top Lithography Machine Manufacturers

In my research, I found several leading lithography machine manufacturers. These companies have made a significant impact in the field and continue to drive innovation in the semiconductor industry.

Here are the top lithography machine manufacturers I came across.


Country: Netherland

Founded: 1984

About the company:

ASML is a leading provider of technology solutions for the semiconductor industry, delivering the tools and services necessary for chip manufacturers to mass produce intricate patterns on silicon. Its customers are among the world’s top chip makers, who use ASML’s comprehensive product offering to produce a variety of semiconductor chips.

ASML offers a full range of hardware, software, and services to its clients, empowering them to increase their value and reduce costs in the chip-making process. With the ability to mass produce precise patterns on silicon, ASML’s customers are well-equipped to stay at the forefront of the industry.

2. Nikon

Country: Japan

About the company:

Shanghai Nikon Precision Machinery Co., Ltd. specializes in providing after-sales service and consulting for semiconductor devices and flat panel display (FPD) optical equipment.

Integrated circuit chips and high-resolution FPDs are critical components in the advancement of the Internet of Things (IoT) and Artificial Intelligence (AI). Nikon is dedicated to research and development (R&D) and production of circuit diagram noise manufacturing systems for these components, contributing to the creation of an intelligent society.

The FPD noise device uses a circuit diagram to control each pixel by projecting it onto the surface of a glass substrate. Nikon offers a range of systems that are widely used in the industry, from large panels with unique multi-lens systems to small and medium-sized panels with intelligent devices.

With ongoing technical innovation, Nikon holds a significant market share in the FPD exposure system space. Semiconductor lithography equipment is used to shrink circuit graphics and project them onto chips, playing a crucial role in the production of integrated circuit chips. This exposure system requires high precision, with measurements as precise as nanometers, and is widely recognized as a highly sophisticated device.

3. Canon

Country: Japan

About the company:

Canon Optical Equipment (Shanghai) Co., Ltd. is a subsidiary of Canon established in mainland China to provide technical support and auxiliary services for the production of semiconductors and LCDs.

In addition to the semiconductor and LCD panel production light devices manufactured by Canon, the company also operates all semiconductor and LCD panel production equipment produced by Canon Machinery Company, Canon Anneihua Company, and Canon Special Machinery Company.

Canon’s involvement in the semiconductor and LCD panel production equipment business in mainland China dates back to the 1980s, when it started exporting low-end semiconductor exposure devices, such as proximity exposure devices and mirror projection exposure devices, to China. In the 1990s, it also supplied line steppers for semiconductor customers in Shanghai. The company’s offerings also include plasma degumming equipment and atmospheric pressure film forming equipment.

With the rapid growth of China’s semiconductor industry in the 21st century, Canon introduced high-end semiconductor exposure devices, such as KrF scanners, to the market. This was facilitated by a partnership with Mitsui Products Group, which broadened the reach of Canon’s products in China.

The company has also successfully expanded its presence in the market for LCD panel production equipment in China. Canon’s LCD panel exposure devices have consistently held a high market share since the inception of the Chinese LCD industry.

Canon is now prioritizing investment in Asia, particularly in the Chinese market, in advanced manufacturing fields such as semiconductors, LCD panels, and organic EL plates. In the future, as a part of the Canon group, the company will further enhance its support for customer enterprises by working closely with manufacturers and strive to improve customer satisfaction and grow its business.

4. Smee

Country: China

Founded: 2002

About the company:

Shanghai Smee Equipment (Group) Co., Ltd., also known as SMEE, is focused on the development, design, production, sales, and technical services of semiconductor equipment, pan-semiconductor equipment, and high-end intelligent equipment.

SMEE’s equipment is utilized in a range of manufacturing industries, including integrated circuit front-end, advanced packaging, flat panel display (FPD) panel, microelectromechanical systems (MEMS), light-emitting diodes (LEDs), power devices, and more.

The company is dedicated to providing its customers with high-quality products and technical services around the clock, striving to offer the best service and create outstanding value. SMEE is certified under the ISO27001 information security, ISO9001 quality management, and ISO14001 environmental management systems, and is committed to providing continuous, stable, and high-quality products and services, as well as fulfilling its responsibilities as a responsible high-tech enterprise.

Applications in Different Industries

As someone who works in the lithography machine industry, I can attest that lithography machines have found applications in various industries, particularly semiconductor, microelectromechanical systems (MEMS), and optoelectronics sectors.

Semiconductor Industry

In the semiconductor industry, lithography machines play a vital role in the production of integrated circuits (ICs). These machines project light through a mask, which contains the pattern for the desired circuit design. As I have witnessed in my work, this pattern is then transferred onto a photosensitive silicon wafer, resulting in the precise replication of the original design at a much smaller scale. This process is particularly important in the manufacturing of advanced semiconductor devices, such as those found in ASML’s EUV lithography machines.

MEMS Devices

Lithography equipment has great significance in generating MEMS devices. I’ve observed in my career that MEMS devices are created through a series of intricate processes involving the patterning, deposition, and etching of thin films on a silicon substrate. Lithography machines help in enabling this precise patterning by producing fine structures according to the designated design. Companies like EVG (EV Group) are known to supply lithography equipment specifically for MEMS device manufacturing.


Optoelectronics is another industry where I have seen lithography machines making a substantial impact. Optoelectronics mainly deals with the manufacture of devices that emit, detect, and control light. Some examples of optoelectronic components include light-emitting diodes (LEDs), solar cells, and laser diodes. Similar to the other industries, lithography machines help in creating the necessary patterns on the semiconductor material for these devices. Companies like SMEE are known to provide equipment that caters to the optoelectronics sector as well.

Extreme Ultraviolet Lithography

I’ve found that Extreme Ultraviolet Lithography (EUVL) is a promising technology in the field of lithography machines. EUVL uses extreme ultraviolet wavelengths (about 13.5 nm) to produce smaller and more dense circuits, enabling the production of advanced semiconductor devices. The EUVL market is expected to grow due to the increasing demand for more efficient and faster chip manufacturing processes, as reported by Globe Newswire.

Nanoimprint Lithography

Another fascinating emerging technology is Nanoimprint Lithography (NIL). NIL involves the direct patterning of a resist by imprinting molds with nanoscale features. This method has garnered attention due to its potential for producing high-resolution features at a lower cost compared to traditional photolithography techniques. As the demand for more intricate nanoscale devices increases, NIL is being researched and developed by various companies and researchers.

Multiple Patterning

Lastly, I’ve noticed that Multiple Patterning is a growing trend in the lithography machine industry. This technique involves splitting a single complex design layer into two or more simpler patterns, which are then printed separately and combined to form the final pattern. Multiple patterning is beneficial for overcoming limitations in resolution and pitch associated with conventional lithography machines. This technology can help companies stay competitive in the semiconductor industry by enabling the production of smaller and more efficient integrated circuits.

In conclusion, Extreme Ultraviolet Lithography, Nanoimprint Lithography, and Multiple Patterning are key emerging technologies and future trends in the lithography machine industry. As these technologies advance, they hold great potential for shaping the future of semiconductor manufacturing and the broader electronics industry.


In conclusion, after researching and analyzing the information gathered, I found that there are a few top lithography machine manufacturers that dominate the market. Among them, ASML stands out as a leading company with advanced EUV lithography machines used by the world’s top chipmakers.

Furthermore, other prominent players in the market include companies like Canon, Nikon, and Veeco. Canon produces semiconductor and LCD panel production light devices, while also operating all semiconductor and LCD panel production equipment produced by its subsidiaries. Nikon and Veeco share a significant portion of the market as well, with their expertise in lithography equipment manufacturing.

Meanwhile, in China, companies like SMEE are making progress in the field. They have developed i-line lithography machines that are increasingly being adopted by leading IC packaging enterprises. This could potentially shift the market dynamics in the future as more local manufacturers develop advanced lithography tools.

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